Name: Bis (diethylamino) silane (BDEAS)

○ Purity: 7N

○ Properties: Colorless transparent liquid at room temperature, boiling point 175‒180℃

○ Package: 5gal, 10gal cylinders

○ Annual Capacity: 50 tons

○ Features: Low-temperature reactive precursor, forming uniform and dense film with excellent insulation,

reducing thermal impact on devices.

○ Applications: Used for high-quality insulating layer and dense layer deposition in advanced semiconductors.

Currently, the manufacturing method of dialkylamino silanes involves synthesizing the target dialkylamino silanes through the reaction of chlorosilane with dialkylamine. In this process, in addition to the target dialkylamino silanes, a large amount of the hydrochloride salt of dialkylamine is also produced as a by-product. Therefore, when obtaining the target dialkylamino silanes, it is necessary to prevent the reduction in volume efficiency caused by the large amount of solvent, so as to produce them at a low cost in large quantities. As the solvent used for the reaction between dialkylamine and chlorosilane, Chemicalbook non-polar polar solvents with high solubility for the hydrochloride salt and metal chlorides of the by-product dialkylamine, and straight-chain or branched-chain hydrocarbons or alkanes with high solubility for dialkylamino silanes that are difficult to dissolve halogen compounds, can be used to produce dialkylamino silanes with low halogen content at a high volume efficiency. After distillation, high-quality dialkylamino silanes with low halogen content (chlorine component) can be obtained. The existing patent and literature technologies for refining di(2-ethylamino) silane (BDEAS) mostly use distillation methods, and the purity of di(2-ethylamino) silane is difficult to exceed 99.99%.