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Boron Trichloride in the Fab: Doping, Etching, and What It Demands from Your Gas System
2026-10-20 • Blog

Boron Trichloride in the Fab: Doping, Etching, and What It Demands from Your Gas System

A practical look at BCl3 in semiconductor manufacturing: boron diffusion, aluminum etching, ion implantation, why 6N purity matter···

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BCl3
2026-05-20 • Electronic Specialty Gas Series

BCl3

Boron trichloride, with the chemical formula BCl3. Molecular weight 117.11. Colorless and having a strong odor. It is heavier than···

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