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Boron trichloride, with the chemical formula BCl3. Molecular weight 117.11. Colorless and having a strong odor. It is heavier than air. It does not burn in air.
Boron trichloride, with the chemical formula BCl3. Molecular weight 117.11. Colorless and having a strong odor. It is heavier than air. It does not burn in air. It fumes in humid air. Melting point -107.3℃, boiling point 12.5℃, relative density 1.34912, refractive index 1.41954. In Chemicalbook, it hydrolyzes in water to form hydrogen chloride and boric acid. It decomposes when exposed to ethanol. It can form coordination compounds with metal chlorides, non-metal chlorides and hydrides. It can react with many organic substances to form various organic boron compounds. The conductivity of liquid boron trichloride is very low. When used as a solvent, it does not have the tendency to ionize salts and strong acids.
○ Name: Boron Trichloride (BCl3)
○ Purity: 6N
○ Annual Capacity: 200 tons
○ Features: High purity, low impurities, stable physical and chemical properties, meeting high-precision semiconductor process requirements.
○ Applications: Used for semiconductor diffusion doping, ion implantation, dry etching; also as catalyst for organic synthesis and raw material for high-performance boron-based materials.
○ Fields: semiconductor manufacturing, advanced material r&d
QUALITY CONTROL INDICATORS
Testing Items | Unit | Indicator | Analytic Method |
BCl3 | Vol% | ≥99.9999 | — |
O2+Ar |
ppm(v/v) | <0.25 |
GC |
N2 | <0.30 | ||
CH4 | <0.1 | ||
CO | <0.05 | ||
CO2 | <0.1 | ||
Cl2 | <0.1 | UV spectrophotometer | |
COCl2 | <0.1 | FTIR | |
HCl | <1 | FTIR | |
SiCl4 | <0.1 | GC |
HEAVY METAL AND OTHER ELEMENT INDICATORS
| Testing Items | Unit | Indicator | Analyt Method |
| Cd | ppb | ≤10 | ICP-MS |
| Pb | ≤10 | ||
| Cu | ≤10 | ||
| Ni | ≤10 | ||
| As | ≤10 | ||
| W | ≤10 | ||
| Mo | ≤10 | ||
| Si | ≤10 | ||
| Zr | ≤10 | ||
| Zn | ≤10 | ||
| Li | ≤10 | ||
| Sb | ≤10 | ||
| Be | ≤10 | ||
| A | ≤10 | ||
| Ba | ≤20 | ||
| Na | ≤20 | ||
| Ca | ≤20 | ||
| Mg | ≤30 | ||
| Fe | ≤30 |