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BCl3

BCl3

CAS:10294-34-5

Formular:BCl3

EINECS:233-658-4

Purity:6N

Capacity:200 tons per year

Boron trichloride, with the chemical formula BCl3. Molecular weight 117.11. Colorless and having a strong odor. It is heavier than air. It does not burn in air.

Service Details

Boron trichloride, with the chemical formula BCl3. Molecular weight 117.11. Colorless and having a strong odor. It is heavier than air. It does not burn in air. It fumes in humid air. Melting point -107.3℃, boiling point 12.5℃, relative density 1.34912, refractive index 1.41954. In Chemicalbook, it hydrolyzes in water to form hydrogen chloride and boric acid. It decomposes when exposed to ethanol. It can form coordination compounds with metal chlorides, non-metal chlorides and hydrides. It can react with many organic substances to form various organic boron compounds. The conductivity of liquid boron trichloride is very low. When used as a solvent, it does not have the tendency to ionize salts and strong acids.


○ Name: Boron Trichloride (BCl3)

○ Purity: 6N

○ Annual Capacity: 200 tons

○ Features: High purity, low impurities, stable physical and chemical properties, meeting high-precision  semiconductor process requirements.

○ Applications: Used for semiconductor diffusion doping, ion implantation, dry etching; also as catalyst for organic synthesis and raw material for high-performance boron-based materials.

○ Fields: semiconductor manufacturing, advanced material r&d


QUALITY CONTROL INDICATORS


Testing Items

Unit

Indicator

Analytic Method

BCl3

Vol%

≥99.9999

O2+Ar

 

 

 

ppm(v/v)

<0.25

 

 

GC

N2

<0.30

CH4

<0.1

CO

<0.05

CO2

<0.1

Cl2

<0.1

UV spectrophotometer

COCl2

<0.1

FTIR

HCl

<1

FTIR

SiCl4

<0.1

GC


HEAVY METAL AND OTHER ELEMENT INDICATORS



Testing ItemsUnitIndicatorAnalyt Method
Cdppb10ICP-MS
Pb10
Cu10
Ni10
As10
W10
Mo10
Si10
Zr10
Zn10
Li10
Sb10
Be10
A10
Ba20
Na20
Ca20
Mg30
Fe30

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