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Silane refers to the silicon-substituted analogues of carbon alkanes.
Silane refers to the silicon-substituted analogues of carbon alkanes. The structure of silane hydrocarbons consists of a main chain formed by a silicon atom linkage and hydrogen atoms covalently linked to the main chain. Silane is a colorless gas with a distinctive odor and is heavier than air.Used in integrated circuit manufacturing, solar cells, coated reflective glass, etc.
○ Name: Silane
○ Purity: 6N
○ Annual Capacity: 5,000 tons
○ Features: High purity, precise delivery, stable performance, an irreplaceable core gas for semiconductor and display industries.
○ Applications: Used for chemical vapor deposition, solar cells, display panels, IC thin film preparation, etc.
○ Fields: semiconductors, display panels , solar cells,silicon-carbon anode
QUALITY CONTROL INDICATORS
| TestingItems | Unit | Indicator | AnalyticMethod |
| SiH4 | Vol% | ≥99.9999 | - |
| H2 | ppm（v/v） | ＜20.0 | GC |
O2+Ar | ＜0.05 | ||
| N2 | ＜0.5 | ||
| CH4 | ＜0.05 | ||
| C2—C4 | ＜0.1 | ||
| CO | ＜0.05 | ||
| CO2 | ＜0.05 | ||
| Chlorosilane | ＜0.1 | ||
| Si2 H6 | ＜0.3 | ||
| H2O | ＜0.5 | Electrolysis |
HEAVY METAL AND OTHER ELEMENT INDICATORS
| Testing Items | Uni | Indicator | Analytic Method |
| Al | ppb | ＜0.2 | ICP-MS |
| Sb | ＜0.2 | ||
| As | ＜0.2 | ||
| B | ＜0.2 | ||
| Ga | ＜0.2 | ||
| P | ＜0.2 | ||
| Cr+ Cu+ Fe+Ni+ Zn | ＜1.0 |
