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Monochlorosilanes can be used in organic synthesis, smoke production, raw materials for single-crystal silicon, optical fibers, etching, chemical vapor depositi···
Monochlorosilanes can be used in organic synthesis, smoke production, raw materials for single-crystal silicon, optical fibers, etching, chemical vapor deposition, etc.
○ Name: Monochlorosilane (MCS)
○ Purity: 4N
○ Annual Capacity: 500 tons
○ Features: High purity and excellent chemical stability, meeting the strict requirements of high-end thin-film deposition precursors.
○ Applications: Used in microelectronic and optoelectronic manufacturing, as a key raw material for thin-film deposition precursors.
○ Fields: semiconductor manufacturing
QUALITY CONTROL INDICATORS
Testing Items | Unit | Indicator | Analytic Method |
| SiH3Cl | Vol% | ≥99.99 | |
| DCS | ppm（v/v） | ≤70 | GC |
| TCS | ≤10 | ||
| STC | ≤10 | ||
| CO | ≤1.0 | ||
| CO2 | ≤1.0 | ||
| N2 | ≤1.0 | ||
| O2+Ar | ≤1.0 | ||
| H2 | ≤20.0 |
HEAVY METAL AND OTHER ELEMENT INDICATORS
| Testing Items | Unit | Indicator | Analytic Method |
| B | ppb | ≤3.0 | ICP-MS |
| P | ≤3.0 | ||
| As | ≤3.0 | ||
| Al | ≤3.0 | ||
| Cr | ≤3.0 | ||
| Fe | ≤5.0 | ||
| Ni | ≤3.0 |
